| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor for ensuring a low leakage current and a higher dielectric constant wherein a substrate is resistive to high-temperature formation of a film of dielectric material, the dielectric material is in single axis orientation and in-plane orientation, and a compression stress is applied to a film. SOLUTION: The capacitor includes a metal substrate in which crystal orientations are oriented in a predetermined direction, a lower electrode provided on the metal substrate and formed of a material having a larger lattice constant in comparison with that of the material forming the metal substrate, a dielectric material provided on the lower electrode and formed of a material having a larger lattice constant in comparison with that of the material forming the lower electrode, and an upper electrode provided on the dielectric material. COPYRIGHT: (C)2009,JPO&INPIT
|
