摘要 |
PROBLEM TO BE SOLVED: To provide an ink-jet recording head which can increase the number of nozzle opening arrays while suppressing increase of terminal arrays as much as possible. SOLUTION: The ink-jet recording head includes a pressure chamber formation substrate 7 where a plurality of pressure chambers 6 communicating with a plurality of nozzle openings are formed in at least three arrays, an elastic film formed on the pressure chamber formation substrate 7 to seal top face openings of the plurality of pressure chambers 6, a plurality of actuators 60 formed on the elastic film correspondingly to the plurality of pressure chambers 6, and a plurality of terminal arrays 22 comprised of a plurality of terminals 20 and 21 connected to the plurality of actuators 60. The plurality of actuators 60 includes a lower electrode film formed on the elastic film, a plurality of piezoelectric films formed on the lower electrode film, and a plurality of upper electrode films formed on the plurality of piezoelectric films. At least two arrays of the plurality of arrays of actuators 60 are connected to at least one array of the plurality of terminal arrays 22. COPYRIGHT: (C)2009,JPO&INPIT
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