| 摘要 |
An improved structure for supporting a microcalorimeter device is disclosed. The structure comprises a substrate with superconducting wiring elements disposed on a surface of the substrate. A membrane layer is suspended above the wiring elements and the substrate surface by a tab element, and a microcalorimeter is disposed on top of the membrane layer. The tab and the membrane layer reside in a common plane, and the membrane layer comprises a material that can be applied and cured at low temperatures (e.g. 350 degrees Celsius or less), so as to have minimal affect on the superconductive wiring elements. The in-plane tab/membrane structure has improved reliability when subject to thermal cycling associated with cryogenic temperatures. A method for forming the structure is also disclosed.
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