| 发明名称 |
Critical dimension estimation |
| 摘要 |
Estimating a state of a critical dimension system comprises inputting a critical dimension measurement and inferring the state of the system based on a model of the critical dimension system and the critical dimension measurement.
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| 申请公布号 |
US2008281438(A1) |
申请公布日期 |
2008.11.13 |
| 申请号 |
US20040831768 |
申请日期 |
2004.04.23 |
| 申请人 |
MODEL PREDICTIVE SYSTEMS, INC. |
发明人 |
MIDDLEBROOKS SCOTT A. |
| 分类号 |
G05B13/02;G06F19/00 |
主分类号 |
G05B13/02 |
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