发明名称 SEMICONDUCTOR CP (CIRCUIT PROBE) TEST MANAGEMENT SYSTEM AND METHOD
摘要 A system and method for semiconductor CP (circuit probe) test management. A control request message is received from a client computer, directing alignment of a probe unit or a wafer in a prober, attachment of a probe pin of the probe unit on a specific area of the wafer, and subsequent execution of CP testing. At least one control command corresponding to the control request message is issued to direct the prober for alignment of the probe unit or the wafer, attachment of the probe pin of the probe unit on the specific area of the wafer, and subsequent execution of CP testing.
申请公布号 US2008281536(A1) 申请公布日期 2008.11.13
申请号 US20070746222 申请日期 2007.05.09
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 CHANG CHIH-CHIEN;YANG KENG-CHIA;HUANG YI-SHENG;SHIN BEN
分类号 G01R31/02;G01R31/26 主分类号 G01R31/02
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