DATA RETRIEVAL DEVICE, DATA RETRIEVAL SYSTEM, DATA RETRIEVING METHOD AND DATA RETRIEVING PROGRAM

摘要

It is an object to provide a surface inspection device (100) to inspect a surface of an object (10) is characterized in comprising a line illuminating unit (120) for linearly illuminating a mask (130) with a pattern (132), a line sensor camera (160) for picking-up the pattern (132) of the mask (130) projected to the surface of the object, and an illumination width variable mechanism (140, 150) for variably changing an illumination width projected to the surface of the object by the line illuminating unit (120).