发明名称 APPARATUS FOR FORMING FILMS ON SUBSTRATES
摘要 <p>A doctor blade assembly for use in combination with apparatus for forming a film on a substrate. The doctor blade assembly includes a doctor blade to be mounted on a programmable robot. The doctor blade has a bottom face and spacers at opposite ends of the body of the doctor blade extending a predetermined distance down below the bottom face of the body for contacting a substrate and spacing the bottom face from the substrate. The spacers are adjustable relative to the doctor blade for adjusting the predetermined distance according to the thickness of film to be formed on the substrate. Other aspects and methods are also disclosed.</p>
申请公布号 WO2008136833(A1) 申请公布日期 2008.11.13
申请号 WO2007US68375 申请日期 2007.05.07
申请人 SYMYX TECHNOLOGIES, INC.;LAMBERT, STEPHEN, MARK;MULLINS, DENNIS;TA, CUONG, MANH;LEUNG, PETER, WING 发明人 LAMBERT, STEPHEN, MARK;MULLINS, DENNIS;TA, CUONG, MANH;LEUNG, PETER, WING
分类号 B05C3/02;B05D1/00;B05D3/12 主分类号 B05C3/02
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