| 摘要 |
PROBLEM TO BE SOLVED: To detect and measure tilt between a first measuring surface and second measuring surface which are measuring surfaces of a subject installed in an optical system. SOLUTION: Luminous flux from a laser light source 1 is travelled to the two subjects 4, 7 through a collimator lens 3. Reflected light reflected on the first measuring surface 5 of the subject 4 and the second measuring surface 8 of the other subject 7 is returned to an outward path, and is projected to a light receiving part 6 such as a CCD from a beam splitter 2 as a spotlight. A distances x of the two projected spotlight from an outer circumference part to another outer circumference part changes depending on an inclination angle between the measuring surfaces 5, 8 of the subject. The distance between the outer circumference parts of the spotlight projected on the light receiving part 6 and a diameter y of the spotlight are detected to obtain a ratio y/x. The value is displayed on a display part as the tilt of the measuring surfaces 5, 8 of the subject. COPYRIGHT: (C)2009,JPO&INPIT
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