| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask for vapor deposition withstanding the rise of temperature and capable of high precision masking when prescribed patterns or the like are vapor-deposited to the substrate to be vapor-deposited using a stock such as plastics, a glass substrate or the like with different thermal expansion coefficients. SOLUTION: Holding substrates 2 composed of various materials are pasted to a mask 1 in which various circuit patterns or the like are formed by adhesion or the other method, so as to be integrated; thus a high precision mask for vapor deposition stabilized to thermal expansion is composed. COPYRIGHT: (C)2009,JPO&INPIT
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