| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that an electrostatic actuator is not driven normally because the insulating film of High-k material has a low resistance and voltage drop increases sharply at a common electrode portion or each individual electrode portion, and to provide an electrostatic actuator in which High-k material can be used by clarifying the relation of the resistance of each individual electrode or a common electrode to the resistance of the High-k material. SOLUTION: In the electrostatic actuator comprising an oscillating board 5 as a common electrode, an electrode (individual electrode 6) opposing the oscillating board, an insulating film 7 formed on the electrode side opposing surface for the electrode of the oscillating board, and a drive means 20 for displacing the oscillating board by electrostatic force, the insulating film is composed of a dielectric film having a dielectric constant higher than that of silicon oxide, and the voltage being applied from the drive means to the actuator portion is set at 95% or more of the input voltage by setting the ratio of resistance between the oscillating board or the electrode and the insulating film at a predetermined value or less. COPYRIGHT: (C)2009,JPO&INPIT
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