发明名称 MIRROR DEVICE WITH AN ANTI-STICTION LAYER
摘要 <p>A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.</p>
申请公布号 WO2008137113(A1) 申请公布日期 2008.11.13
申请号 WO2008US05737 申请日期 2008.05.03
申请人 OLYMPUS CORPORATION;SILICON QUEST KABUSHIKI-KAISHA;ISHII, FUSAO 发明人 ISHII, FUSAO;ICHIKAWA, HIROTOSHI;WATANABE, KAZUHIRO;ICHIKAWA, HIROTOSHI
分类号 G02F1/19 主分类号 G02F1/19
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