| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum film deposition system using a polymer film as a base material and capable of increasing barrier properties toward an organic EL (electroluminescence) or the like, to provide a method for producing a polymer film laminate, and to provide a polymer film laminate. SOLUTION: The vacuum film deposition system comprises: a temperature controller-containing main roll 34 for controlling the temperature of a film surface upon film deposition and forming a film on the surface; an electrode 36 provided with a magnetron and capable of hollow cathode discharge; and a raw material introduction pipe 38. COPYRIGHT: (C)2009,JPO&INPIT
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