| 摘要 |
PROBLEM TO BE SOLVED: To provide a carbon nano-tube synthesizing apparatus and its method. SOLUTION: The carbon nano-tube synthesizing apparatus includes a reaction chamber, a cassette, a carrying means, a heater, a gas supply unit and a gas discharge unit. Carbon nano-tubes are synthesized in the reaction chamber having a substantially vertical major axis. A plurality substrates are mounted in the cassette. The carrying means moves along the vertical major axis of the reaction chamber and mounts the cassette in the reaction chamber or dismounts the cassette from the chamber. The heater supplies heat to the reaction chamber. The gas supply unit supplies a gas for the synthesis of the carbon nano-tubes to the reaction chamber. The gas discharge unit discharges a residual gas from the reaction chamber to the outside. By vertically disposing the reaction chamber and placing a stand-by chamber below the reaction chamber, the carbon nano-tubes can be easily collected, which is more effective for managing the reaction chamber as well as increases the productivity of carbon nano-tubes. COPYRIGHT: (C)2009,JPO&INPIT
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