IMAGING SYSTEM FOR SHAPE MEASUREMENT OF PARTIALLY-SPECULAR OBJECT AND METHOD THEREOF

摘要

A shape measuring apparatus and method of a partially-specular object can broaden the measurement range to a partially-specular object while maintaining the advantage of the active optical measurement method. A shape measuring apparatus(100) of a partially-specular object comprises a light emitting unit(110), a light-receiving unit(120), and a control unit. The light emitting unit irradiates the light to the surface of a partially-specular object. The light-receiving unit measures topology data of the partially-specular object through the light reflected from the surface of the partially-specular object. The light-receiving unit comprises a spatial light modulator(122) controlling the attenuation ratio of the pixel which corresponds to the spot photo-saturated in a camera(125). The control unit(130) detects the pixels in which the light saturation occurs and controls the attenuation ratio of the pixels of the spatial light modulator which correspond to the pixels. Therefore, the final image data in which the light saturation and blooming do not occurs.