METHOD FOR FABRICATING CAPACITOR HAVING STORAGE ELECTRODE MIXED CONCAVE AND CYLINDER

摘要

The charging capacity can be increased with the effect of area increase of electrode. The electrode serving as the charge storage electrode or the bottom electrode has the concave structure. Therefore, there is no leaning phenomenon. A step is for forming the first insulating layer(102) having first hole. A step is for forming the amorphous carbon layer to fill first hole pattern. A step is for forming the second insulating layer(104) on the first insulating layer. A step is for forming the second hole pattern and being perpendicularly connected to the first hole pattern by etching the second insulating layer. A step is for removing an amorphous carbon layer. A step is for forming the concave electrode inside the final hole pattern which is made of the first hole pattern and the second hole pattern. A step is for removing a part of the second insulating layer.