发明名称 A LASER WORKING SYSTEM
摘要 <p>The laser processing system is provided to consecutively load workpieces in system. The laser processing system comprises as follows. A carrier unit is for mounting the object for processing. A marking unit can process is serially arranged in the progressive direction of the carrier unit. A loading unit is arranged across a transferring unit. The carrier unit(12) is comprised of and the moveable member(14) and a carrier making mobile. The upper side of the carrier unit(10) is flat. The laser processing system has the marking unit. The laser of the marking unit(20) is serially positioned in the upward in the X-axis moveable member(16). The brush unit is disposed above the line where the carrier moves along the moveable member,.</p>
申请公布号 KR20080098921(A) 申请公布日期 2008.11.12
申请号 KR20070044323 申请日期 2007.05.07
申请人 HANMISEMICONDUCTOR CO., LTD. 发明人 MOON, BYUNG KWAN;JEONG, DEOK PIL
分类号 H01L21/677;H01L21/268 主分类号 H01L21/677
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