摘要 |
A contact pusher (220a) is mounted on a leading end of a contact arm (210), which brings an IC device (10) into contact with the contact section of a test head, and presses the IC device (10). The contact pusher is provided with a suction pad (240) for holding the IC device (10) by suction; a first press section (250) for pressing a package (11) of the IC device (10); a second press section (260) for pressing a terminal (12) of the IC device (10); and a base section (230) for transferring heat to the first press section (250). The first press section (250) is brought into contact with the base section (230), and the first press section (250) is arranged to make a fine shift relatively to the base section (230). |