HIGH SPEEDULTRA PRECISION ATOMIC FORCE MICROSCOPE USING DISPLACEMENT SENSORS WHICH MEASURE BOTH ENDS OF CANTILEVER

摘要

A high speed high precision atomic force microscope can obtain exact nano topology data by using an absolute displacement sensor and a relative displacement sensor. A high speed high precision atomic force microscope comprises a cantilever(102), an actuator(103), and a first and a second sensing unit(201). The cantilever moves up and down along the shape of a measurement object. The actuator controls so that the constant power is exerted on the cantilever. The second sensing unit is equipped on one end of the cantilever, and measures the absolute displacement of the actuator. The first sensing unit is equipped on the other end of the cantilever, and measures the relative displacement between the cantilever and actuator.