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发明名称
Substrate transfer apparatus
摘要
申请公布号
EP1770771(A3)
申请公布日期
2008.11.12
申请号
EP20060020246
申请日期
2006.09.27
申请人
SHINKO ELECTRIC INDUSTRIES CO., LTD.
发明人
SUYAMA, TOSHIAKI;KAWAHARA, MAKOTO;YAMAZAKI, MASARU;ROKUGAWA, TAKAHIRO
分类号
H01L21/677
主分类号
H01L21/677
代理机构
代理人
主权项
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