发明名称 STRIP TRANSFER PICKER FOR MANUFACTURING SEMICONDUCTOR
摘要 The strip fixing process at the next process position can be stably and smoothly performed by transferring the strip to the next process position in a flat state. The stable fixing and the disintegration work can be performed by solving warpage. The return picker comprises the base(21); a plurality of grippers(30) which is rotatably installed at two part of the base around the hinge shaft and fixes the bi-edge of the strip or disintegrates; the gripper operating unit which is installed at the base and circulates the gripper; a pair of correction unit for making flat the strip by pressing warpage deformation, installed at the front-end and back-end of the base.
申请公布号 KR20080098829(A) 申请公布日期 2008.11.12
申请号 KR20070044175 申请日期 2007.05.07
申请人 HANMISEMICONDUCTOR CO., LTD. 发明人 JANG, DONG KI
分类号 H01L21/68;H01L21/67 主分类号 H01L21/68
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