| 摘要 |
A probe unit and an inspection apparatus are provided to suppress twist, warp, and a damage to the probe and support each contactor exactly so that the contactor is accurately contacted to the electrode. In a probe unit and inspection apparatus, a blade-type probe(38) is positioned accurately and are supported at a main board(50, 60). End arms(51, 61) support a contactor while being supported by end of the main board. A blade-type probe(38A) is composed of a blade-type probe for the first row and row-blade-type probe for other rows while being supported by An FPC of the main board. |
