METHOD FOR FABRICATING CONTACT PLUG

摘要

The method for manufacturing contact plug is provided to increase the contact area and to obtain the contact plug having low resistance and to reduce contact resistance and drive current. A step is for forming a plurality of gate patterns(12) on the substrate(11). A step is for forming the first plug(14) on the substrate between the gate pattern. A step is for forming the separation film on the first plug. A step for forming the contact hole which opens first plug by etching the separation film between the gate pattern. A step is for forming the second plug on the first plug.