| 摘要 |
A method for manufacturing an image sensor is provided to reduce vertical scale and photon loss because of using a planarization layer of polymer. A step is for forming a protective film(130) on the substrate including the pad region(120) and pixel region. A step is for forming the color filter layer(140) on the protective film of the pixel region. A step is for forming a first low-temperature oxide layer(150) in the entire substrate including the color filter layer. A step is for forming the oxide layer microlens(160) on the first low-temperature oxide layer. A step is for performing the plasma surface treatment on an oxide layer microlens.
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