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发明名称
Atomic deposition layer methods
摘要
申请公布号
EP1840241(A3)
申请公布日期
2008.11.12
申请号
EP20070007579
申请日期
2003.07.21
申请人
MICRON TECHNOLOGY, INC.
发明人
CASTROVILLO, PAUL J.;SANDHU, GURTEJ S.;DERDERIAN, GARO J.;BASCERI, CEM
分类号
C23C16/34;C23C16/44;C23C14/06;C23C14/08;C23C16/40;C23C16/455;C30B25/14;H01L21/285;H01L21/316;H01L21/768
主分类号
C23C16/34
代理机构
代理人
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地址
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