发明名称 |
Methods and systems of enhancing stepper alignment signals and metrology alignment target signals |
摘要 |
Methods and systems of enhancing stepper alignment signals and metrology alignment target signals. In one embodiment, a plurality of alternating rows comprising a first material of a first height and a second material of a second height are constructed. The first material and the second material are selected to enhance the contrast of the mark when imaged for alignment of photolithographic structures.
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申请公布号 |
US7449790(B2) |
申请公布日期 |
2008.11.11 |
申请号 |
US20040928466 |
申请日期 |
2004.08.26 |
申请人 |
HITACHI GLOBAL STORAGE TECHNOLOGIES, INC. |
发明人 |
ZHENG YI;ZOLLA HOWARD;SUN NIAN-XIANG;BALAMANE HAMID |
分类号 |
H01L23/544 |
主分类号 |
H01L23/544 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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