发明名称 |
Generic interface for an optical metrology system |
摘要 |
An optical metrology system includes a photometric device with a source configured to generate and direct light onto a structure, and a detector configured to detect light diffracted from the structure and to convert the detected light into a measured diffraction signal. A processing module of the optical metrology system is configured to receive the measured diffraction signal from the detector to analyze the structure. The optical metrology system also includes a generic interface disposed between the photometric device and the processing module. The generic interface is configured to provide the measured diffraction signal to the processing module using a standard set of signal parameters. The standard set of signal parameters includes a reflectance parameter, a first polarization parameter, a second polarization parameter, and a third polarization parameter.
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申请公布号 |
US7450232(B2) |
申请公布日期 |
2008.11.11 |
申请号 |
US20070856651 |
申请日期 |
2007.09.17 |
申请人 |
TIMBRE TECHNOLOGIES, INC. |
发明人 |
LI SHIFANG;BAO JUNWEI;JAKATDAR NICKHIL;NIU XINHUI |
分类号 |
G01J4/00;G01B7/00;G01B11/14;G01B11/24;G01B11/30;G01B15/00;G01N21/21;G01N21/47;G01N21/86;G01V8/00;G03F7/20;G06F15/00 |
主分类号 |
G01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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