发明名称 Apparatus and method of removing particles
摘要 An impurities elimination apparatus including a base plate, a first nozzle for removing impurities on the base plate using air suction, a glass substrate disposed on the base plate, and a second nozzle for coating the glass substrate with an organic material.
申请公布号 US7448396(B2) 申请公布日期 2008.11.11
申请号 US20050152184 申请日期 2005.06.15
申请人 发明人
分类号 B08B6/00;B08B5/04;G02F1/1333;G02F1/136;H01L21/00;H01L21/77;H01L21/84;H01L23/58;H01L29/10 主分类号 B08B6/00
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