APPARATUS FOR CARRYING SUBSTRATE USING BAR CODE

摘要

An apparatus for carrying a substrate is provided to determine the location of carrier in the vacuum chamber without error. An apparatus for carrying a substrate comprises the carrier(110) in which the substrate(160) of the display device is settled and is shut tightly within the vacuum chamber(170); the linear motor(120) which perpendicularly moves the carrier; the conveying unit(130) making the movement of the carrier smooth; the bar code(140) adhered to the carrier; the bar-code reader(150) which decides the location of the carrier according to recognize of the bar code.