| 摘要 |
An integrated optical device and method of fabricating a spatial filter is provided to shorten working time by forming groove under the substrate and improve the polarization extinction property of the optical condenser by forming amorphous region and micro-rack on the groove. An integrated optical device includes a substrate, a waveguide formed on the upper side of substrate in the longitudinal direction. A spatial filter formed under the lower-part of substrate. The spatial filter is groove formed under the lower-part of the substrate and amorphous region and micro-rack(701) are formed on partial surface of the groove. A groove is formed in 1/4, 1/2 spot, 3/4 of substrate in the longitudinal direction. The width of groove is the maximum 500um and Depth is the maximum 70% of the substrate thickness.
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