DEVICES AND METHODS FOR PREPARING NANO PARTICLE USING PULSE COLD PLASMA

摘要

An apparatus for manufacturing nano particle and a method for manufacturing the same using a low temperature pulse plasma are provided to manufacture nano particle with a superior particle uniform characteristic and a capture efficiency because a nano particle formed domain and a nano particle-receiving region are separated and a thin film is not formed in case of collecting the nano particle in the receiving region and to be applied to a secondary battery and a sensor because an evaporation besides collection of the nano particle is performed at the same time in the nano particle receiving region. A reaction chamber comprises a gas-inlet(31), a receiving unit and a division unit(39). The reaction chamber is separated according to a nano particle formed domain(A) and a nano particle-receiving region(B) by the division unit. A gas supplying part transfers a process gas and an ambient gas through the gas-inlet. A power supply unit generates a plasma within the reaction chamber. A flow control part controls a vacuum formation and a gas flow within the reaction chamber. The nano particle formed domain within the reaction chamber is formed between the gas-inlet and the division unit.