METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A FILLER LAYER AND A MASKING LAYER

摘要

The invention relates to a method for producing a micromechanical component. According to said method, a trench structure is essentially completely filled with a first filler layer and a first masking layer is applied to the first filler layer, to which masking layer a second filler layer and a second masking layer are applied. The invention also relates to a micromechanical component, wherein the first filler layer fills the trench structure of the micromechanical component and at the same time forms a mobile sensor structure.