发明名称 |
SURFACE EMISSION TYPE ELECTRON SOURCE AND DRAWING DEVICE |
摘要 |
<p>A surface emission type electron source comprises a planar first electrode, a planar second electrode provided in opposition to the first electrode, an electron passage layer provided between the first electrode and the second electrode, and a power section for applying voltage to the second electrode and the first electrode. In the electron passage layer, a plurality of quantum wires extending in a first direction heading for the second electrode from the first electrode are provided with a predetermined gap therebetween. Electrons are emitted from the surface of the second electrode. The quantum wire is composed of silicon. In the quantum wire, a plurality of portions whose thickness is thin are formed with a predetermined gap therebetween in the first direction.</p> |
申请公布号 |
WO2008133275(A1) |
申请公布日期 |
2008.11.06 |
申请号 |
WO2008JP57852 |
申请日期 |
2008.04.23 |
申请人 |
CRESTEC CORPORATION LTD.;KOJIMA, AKIRA;OHYI, HIDEYUKI |
发明人 |
KOJIMA, AKIRA;OHYI, HIDEYUKI |
分类号 |
H01J1/312;H01J3/14;H01J37/073;H01J37/305;H01L21/027 |
主分类号 |
H01J1/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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