THIN FILM TRANSISTOR ARRAY SUBSTRATE, MANUFACTURING METHOD THEREOF, AND DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable thin film transistor array substrate. SOLUTION: A thin film transistor array substrate comprises: an island-like semiconductor layer 3 formed on a substrate 1; conductive patterns 4 formed on a source region 31 and a drain region 32; a gate electrode 6 disposed on a counter face of a channel region 33 via a gate insulating film 5; an interlayer insulating film 7; source wiring 44 formed on the interlayer insulating film 7; a protecting film 8; a pixel electrode 10 connected to the conductive pattern 4 on the drain region 32 via a contact hole 9; and a connection pattern 11 formed from the same layer as the pixel electrode 10 and connected to the source wiring 44 and the conductive pattern 4 on the source region 31 via the contact hole 9, wherein the conductive pattern 4 is disposed while deviating its end portion inside from a pattern end portion in the semiconductor layer 3 by a first distance t2 or more. COPYRIGHT: (C)2009,JPO&INPIT