发明名称 AC CONVERTER, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To attain a constitution which enables electric power to be simultaneously supplied to a plurality of loads without causing an increase in the size of a device and a cost increase. <P>SOLUTION: The AC converter, which converts an AC power of a plurality of phases to a different AC power of a different voltage and frequency to be supplied to loads, includes switch groups comprising a plurality of switches for converting an AC power of the plurality of phases to a different AC power of a different voltage and frequency, a changeover switch for switching the output from the switch groups to a plurality of loads, and a control unit for controlling the switch groups and the changeover switch so that the voltage and the frequency to be supplied to the plurality of loads becomes a preset value respectively. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008271718(A) 申请公布日期 2008.11.06
申请号 JP20070112297 申请日期 2007.04.20
申请人 CANON INC 发明人 SATO TERUYA
分类号 H02M5/297;G03F7/20;H01L21/027 主分类号 H02M5/297
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