| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular-decomposition scatterometer that does not indicate measuring errors due to residual defocus or that indicates them only to a smaller extent, and to provide a scatterometer measuring method. <P>SOLUTION: The angular-decomposition scatterometer is provided with an opening plate that includes at least one covered and hidden part that extends into an image on the pupil surface. A defocus value of a target pattern is determined from the radial distance between the innermost point of an image at the covered and hidden part and the nominal center of a pupil image. A plurality of normalization images are captured, by using a reference plate at a plurality of different defocus positions, and proper normalization is subtracted from a measuring spectrum of the target pattern, thereby compensating defocus errors. <P>COPYRIGHT: (C)2009,JPO&INPIT |
