| 摘要 |
PROBLEM TO BE SOLVED: To prevent damage to a lifter pin and an electrode provided on a mounting base made of a plurality of stacked plates. SOLUTION: A substrate mounting base comprises a lifter pin 242 provided so that it can go up and down freely in a pin insertion hole 214 that penetrates through an electrode plate 210 arranged at the uppermost part, and a lifting guide body 300 that guides the ascending/descending of the lifter pin 242, wherein the lifting guide body 300 is arranged through a through-hole 226 of a temperature adjustment plate 220 stacked beneath the electrode plate 210, and regulated by a positioning pin 350 so that it cannot move in the horizontal direction with respect to the electrode plate 210. COPYRIGHT: (C)2009,JPO&INPIT |
