| 摘要 |
PROBLEM TO BE SOLVED: To provide a specific constitution capable of preventing the entry of dust to a release type cassette, storing/conveying the cassette even in a space low in cleanliness and conveying an article to a treatment device using the cassette wrapped by a sheet material, and to easily perform wrapping or unwrapping of the sheet material. SOLUTION: The sheet material is wrapped around the release type cassette by a wrapping device 14, and it is made air-tight to the periphery, the sheet material is peeled off by an unwrapping device 10, and the article can be put in/out relative to the cassette. COPYRIGHT: (C)2009,JPO&INPIT |
