| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal microscope shortening a measurement time. SOLUTION: A linear bright line is taken out from light emitted from a light source 22, and white light emitted from the bright line is color-dispersed by a chromatic aberration generation lens 34 to continuous wavelength components, and thereafter, a sample 21 placed on a stage 37 is irradiated with the light through an objective lens 36. The color-dispersed linear bright lines of every wavelength are continuously imaged in a height direction on an optical axis 41, then, the light of one wavelength is focused on a certain one point of the surface of the sample 21. The reflected light of the wavelength after being focused on the surface of the sample 21 is condensed by the chromatic aberration generation lens 34 through the objective lens 36, and thereafter, the light is focused on a slit 52. The light that has passed through the slit 52 is dispersed by a spectral element 62, and imaged by a two-dimensional array photodetector 82. COPYRIGHT: (C)2009,JPO&INPIT
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