| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the operation of a signal processing circuit from becoming instable due to light not shielded by a light shielding layer by being made incident obliquely to the signal processing circuit, and to prevent the operation of the signal processing circuit from becoming instable due to an influence of suspension charges generated by the light emitted to light shielding layer. <P>SOLUTION: In a light incident part 12 in which a photodetector 36 and a signal processing circuit 38 for processing signals outputted from the photodetector 36 are formed on an SOI substrate, a top layer of wiring layers on the signal processing circuit 38 is turned to the light shielding layer 42 for shielding sunlight, and a plurality of contact plugs 52 electrically connected with the light shielding layer 42 are laminated along the end of the light shielding layer in the thickness direction of the SOI substrate. The plurality of contact plugs 52 are turned to have potential sufficient for pulling out the suspension charges generated on the ground or the light shielding layer. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
