| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide processing slurry and a method capable of uniformly and clearly forming texture streaks with an average surface roughness≥0.10 nm to≤0.30 nm, and a line density≥40 pieces/μm without causing a processing spot and unnecessary residue on a surface of a substrate. <P>SOLUTION: The Ni-P-plated aluminum substrate is texture-processed. The substrate 15 is rotated, the processing slurry is supplied on the surface of the substrate, and a processing tape 14 is pressed to the surface of the substrate to be run. The slurry comprises a polishing material and a dispersion medium, and comprises a secondary particle made of a diamond particle with a primary particle diameter of 20 nm or less as the polishing material. The particle size distribution D50 of the secondary particle is within a range of 0.10-0.28μm. The dispersion medium comprises a glycol compound, fatty acid with a carbon number within a range of 8-22, alkanolamine, fatty acid amide, and a phosphate compound as additives. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
