| 摘要 |
PROBLEM TO BE SOLVED: To optimize the time for charging an organic material into a template, thereby eliminating the charging failure and improving the throughput. SOLUTION: A method of forming a pattern includes steps of describing irregular pattern information in the template 6 on which a predetermined irregular pattern is formed on a surface thereof, allowing the template 6 to be in contact with a photocuring organic material coated on a surface of a wafer substrate 7, allowing a controller 5 to calculate the time required for charging the photocuring material into the irregular pattern based on the irregular pattern information read by a sensor 2, and controlling a light source 1d so as to emit a light after the elapse of the calculated time. COPYRIGHT: (C)2009,JPO&INPIT
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