| 摘要 |
PROBLEM TO BE SOLVED: To suppress the increase of interfacial resistance on the terminal portion of an electro-optical device. SOLUTION: On the pixel portion 14 of a lower substrate of a liquid crystal display device which is an electro-optical device, conductive lamination films of a connection wire 24 for the pixel, a molybdenum film 96 for the pixel and a transparent conductive film 28 for the pixel are formed, and on the terminal portion 20, conductive lamination films of a connection wire 124 for the terminal and a transparent conductive film 28 for the terminal are formed. A molybdenum film 197 for the terminal has the same aperture as that of a protection insulating film 62. The connection wire 24 for the pixel and the connection wire 124 for the terminal are formed in the same process and each of which has an uppermost layer containing titanium. The molybdenum film 96 for the pixel and the molybdenum film 196 for the terminal are formed in the same process and the transparent conductive film 28 for the pixel and the transparent conductive film 128 for the terminal are formed in the same process. Instead of the molybdenum film, another conductive material which can be wet-etched can be also used. COPYRIGHT: (C)2009,JPO&INPIT
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