| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet recording head which (1) can reduce positional deviation of an ejection opening by suppressing deformation of a substrate, (2) is high in mechanical strength, can avoid breakage at the time of handling and mounting, can perform high-definition and high-speed recording that enables good printing, and can be made long, and to provide a new manufacturing method therefor. SOLUTION: In the manufacturing method for the inkjet recording head, the manufacturing method for the inkjet recording head includes (a) a step of forming a mask layer with the openings in the substrate rear surface, (b) a step of forming grooves with etching bottom parts with a size larger than the opening size by etching from the openings, and (c) a step of forming through holes in the substrate by etching the substrate exposed from the grooves and of also forming beams and a common liquid chamber by communicating the adjoining grooves. COPYRIGHT: (C)2009,JPO&INPIT
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