METHOD OF MANUFACTURING IMPRINT MOLD

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an imprint mold reducing variations of a dimension and a cross sectional shape, and suppressing a deterioration of processing capacity. SOLUTION: A plurality of graphics contained in a design pattern data are respectively classified into: a first graphic having the dimension of the dimension reference value or less; and a second graphic having a larger dimension than the dimension reference value, and the method of manufacturing the imprint mold comprises steps of: generating the first and second drawing pattern data from the first and second graphics respectively; transferring the first graphic to a substrate by using the first drawing pattern data; and transferring the second graphic to the substrate by using the second pattern data. COPYRIGHT: (C)2009,JPO&INPIT