发明名称 SYSTEM AND METHOD FOR PREPARING NANOPARTICLES USING NON-THERMAL PULSED PLASMA
摘要 A system for preparing nanoparticles using non-thermal pulsed plasma is provided. The system comprises a reaction chamber having two divided regions, i.e. a first region where nanoparticles are to be formed and a second region where the nanoparticles are to be received, to prevent the formation of a thin film of nanoparticles in the second region. The use of the system enables the preparation of nanoparticles with improved uniformity and high collection efficiency. In addition, collection and deposition of nanoparticles can be simultaneously performed in the second region. Therefore, the system can find applications in various fields, including devices, secondary cells and sensors. Further provided is a method for preparing nanoparticles using the system.
申请公布号 US2008271987(A1) 申请公布日期 2008.11.06
申请号 US20070951467 申请日期 2007.12.06
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 NOH CHANG HO;KIM TAE SUNG;KIM KWANG SU
分类号 H05H1/00 主分类号 H05H1/00
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