CHEMICAL VAPOR DEPOSITION APPARATUS FOR FLAT DISPLAY

摘要

A chemical vapor deposition apparatus for a flat display is provided to cool susceptor to the proper level in short time, thereby minimizing the work loss and maintenance time. A deposition process for a flat display panel is performed at a chamber(10). A susceptor(50) installed at the inside of the chamber to be ascended or descended loads the flat display. A cooling section(70) compulsorily cools the susceptor heated in the deposition process by cooling the exterior wall of the chamber and dropping the temperature of inside of the chamber. A chamber comprises an upper and a lower chambers. The upper chamber has an electrode for discharging the deposition material. The lower chamber connected to the upper chamber has the susceptor.