MANUFACTURING METHOD OF FIELD EMISSION ARRAY

摘要

A manufacturing method of field emitting element is provided to implement the large-sized field emission device by making the interval of emitter to the nano size. A manufacturing method of field emitting element includes the step of forming the nanosphere layer(102) on the substrate(100); the step of ashing the nanosphere layer in order to reduce the size; the step of depositing the metal catalyst(106) on the surface of substrate; the step of removing the nanosphere; the step of growing the carbon nanotube in the metal catalyst. The nanosphere includes the polystyrene.