SEMICONDUCTOR INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor inspection device capable of preventing semiconductors which are good products from being adversely affected by a defective semiconductor from the viewpoint of electric characteristics by separating the defective semiconductor from the other good semiconductors immediately when the defective semiconductor is detected from among a plurality of semiconductors to be inspected during the inspection to conduct the inspection for determining good or defective semiconductor accurately without causing error. SOLUTION: In this semiconductor inspection device for inspecting a plurality of semiconductors to be inspected (1-n) 110, an abnormality detection circuit 120 is inserted into each semiconductor to be inspected 110 with respect to reference potential being common among all the power supplies, and a power supply shut-off circuit 130 inserted into power supply wires from all the power supplies in an inspection device main body 100 is automatically operated in accordance with detection signals output from the abnormality detection circuit 120 to separate the defective semiconductor from the other good semiconductors immediately when abnormal current is generated by the defective semiconductor among the semiconductors to be inspected (1-n) 110. COPYRIGHT: (C)2009,JPO&INPIT