| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology for grasping a fouling state in a vacuum vessel of a film-forming apparatus before a film is formed. <P>SOLUTION: The method for sensing a fouling substance in the vacuum vessel of the film-forming apparatus comprises the steps of: arranging a sensing substrate in the vacuum vessel (step S100); making the vacuum vessel into a predetermined vacuum state (steps S120 and S160); leaving the sensing substrate in the vacuum vessel for a predetermined period of time, while maintaining the vacuum vessel in the predetermined vacuum state (step S180); and analyzing a substance which deposits on the surface of the sensing substrate having been left in the step S180 (step S220). <P>COPYRIGHT: (C)2009,JPO&INPIT |
