| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic sensor having high environment-resistant characteristics and stabilized acoustic characteristics, and to provide its fabricating method. SOLUTION: The acoustic sensor comprises an electrostatic capacity type acoustic sensor body 10a and a filter layer 17. At the acoustic sensor body 10a, a diaphragm-like movable plate portion 12, formed by using a semiconductor substrate within a frame portion 11 serves as a movable electrode, while a fixed plate portion 14 facing the movable plate portion 12 at one surface side of the frame portion 11 serves as a fixed electrode. Moreover, a through hole 15, penetrating a space 16 between the movable plate portion 12 and the fixed plate portion 14, is provided at the fixed plate portion 14. The filter layer 17 is arranged at a surface side opposite to the movable plate portion 12 in the fixed plate portion 14 of the acoustic sensor body 10a, in a fashion where it blocks the through hole 15. The filter layer 17 comprises a porous layer 17a with water-proof nature, dust-proof nature, and permeability and an adhesive layer 17b prepared on one surface side of the porous layer 17a, and the filter layer 17 is pasted to the acoustic sensor body 10a by the adhesive layer 17b. COPYRIGHT: (C)2009,JPO&INPIT
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